Micro rotation stages

Xeryon offers various piezo driven precision rotation stages. The error motion of our rotation stages is exceptionally small in the radial, axial and tilt direction. This makes our stages the most precise piezoelectric rotation stage on the market. The rotation angle is unlimited and can be controlled via the integrated optical encoder. This ensures an accurate closed-loop resolution and low repeatability.

The XRT-U is a compact and very precise rotation stage driven by an ultrasonic piezo motor. With the XRT-U, you can achieve error motion values close to an air bearing rotary stage, but in a smaller volume and for a lower price.

Compared to other piezo motor technologies, an ultrasonic piezo motor ensures you a non-degrading and vibration-free precision without generating any undesired dither motion during standstill. This makes the XRT-U a state-of-the-art rotation stage for applications such as micro-CT scanners, metrology applications and vacuum and non-magnetic applications, such as electron microscopy.

Product Selection
Model Image
Rotation Stage mm
Driving torque mNm
Axial in centre µm
Radial at 7 mm above top surface µm
Speed °/s
Repeatability urad
Precision
XRT-U-25
27
10
2.5
5
1080 max.
0.008 min.
± 125
± 50
± 25
± 15
± 0.017%
XRT-U-30
32
14
0.5
1
720 max.
0.008 min.
± 125
± 50
± 25
± 15
± 0.017%
XRT-U-40
43
20
1
2
540 max.
0.006 min.
± 125
± 50
± 25
± 15
± 0.017%
XRT-U-60
65
90
2.5
5
360 max.
0.004 min.
± 125
± 50
± 25
± 15
± 0.017%

Product